Patrick David Vogelsang
5Patents
2h-index
17Co-inventors
44Inventor score
Filing activity: Dec 20, 2000 → Aug 3, 2012
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6875992B2 | Position measuring device, position measuring system, lithographic apparatus, and device manufacturing method | Physics | 8 | Expired |
| US6894261B2 | Position measuring system for use in lithographic apparatus | Physics | 6 | Expired |
| US7830495B2 | Lithographic apparatus and position sensor | Physics | 2 | Active |
| US8952328B2 | Charged particle detector system comprising a conversion electrode | Electricity | 1 | Active |
| US8384879B2 | Optical position sensor, a position sensitive detector, a lithographic apparatus and a method for determining an absolute position of a movable object to be used in a relative position measurement system | Physics | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.