Paul John Shechter
6Patents
3h-index
2Co-inventors
43Inventor score
Filing activity: Jun 16, 2004 → Dec 28, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7481867B2 | Vacuum system for immersion photolithography | Physics | 11 | Active |
| US8164734B2 | Vacuum system for immersion photolithography | Physics | 7 | Active |
| US8830440B2 | Vacuum system for immersion photolithography | Physics | 4 | Active |
| US9507270B2 | Vacuum system for immersion photolithography | Physics | 1 | Active |
| US9857699B2 | Vacuum system for immersion photolithography | Physics | 1 | Active |
| US10168624B2 | Vacuum system for immersion photolithography | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.