Peter Federlin
1Patents
1h-index
2Co-inventors
22Inventor score
Filing activity: Nov 14, 1994 → Nov 14, 1994
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5572398A | Tri-polar electrostatic chuck | Electricity | 82 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.