Inventor · Aalen, DE

Peter Kuerz

5Patents
2h-index
12Co-inventors
40Inventor score

Filing activity: Jan 30, 2013 → Apr 23, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US9316929B2 EUV exposure apparatus with reflective elements having reduced influence of temperature variation Physics 7 Active
US10031423B2 EUV exposure apparatus with reflective elements having reduced influence of temperature variation Physics 3 Active
US10684551B2 EUV exposure apparatus with reflective elements having reduced influence of temperature variation Physics 0 Active
US10317802B2 EUV exposure apparatus with reflective elements having reduced influence of temperature variation Physics 0 Active
US9746778B2 EUV exposure apparatus with reflective elements having reduced influence of temperature variation Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.