Peter Kuerz
5Patents
2h-index
12Co-inventors
40Inventor score
Filing activity: Jan 30, 2013 → Apr 23, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9316929B2 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Physics | 7 | Active |
| US10031423B2 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Physics | 3 | Active |
| US10684551B2 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Physics | 0 | Active |
| US10317802B2 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Physics | 0 | Active |
| US9746778B2 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.