Inventor · Essenbach, DE

Peter Schaeffler

1Patents
1h-index
3Co-inventors
25Inventor score

Filing activity: Feb 11, 2010 → Feb 11, 2010

Most-cited inventions

PatentTitleAreaCited byStatus
US8532364B2 Apparatus and method for detecting defects in wafer manufacturing Physics 6 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.