Prashant Gadgil
3Patents
3h-index
7Co-inventors
36Inventor score
Filing activity: Mar 29, 1996 → Oct 21, 1999
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6241845A | Apparatus for reducing process drift in inductive coupled plasma etching such as oxide layer | Electricity | 232 | Expired |
| US6048798A | Apparatus for reducing process drift in inductive coupled plasma etching such as oxide layer | Electricity | 33 | Expired |
| US5783496A | Methods and apparatus for etching self-aligned contacts | Electricity | 24 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.