Inventor · Suwon-si, KR

Raewon Yi

4Patents
1h-index
4Co-inventors
30Inventor score

Filing activity: Jun 25, 2020 → Mar 7, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US11506968B2 Method of annealing reflective photomask by using laser Electricity 2 Active
US11934092B2 Method of annealing reflective photomask by using laser Electricity 0 Active
US11852583B2 Apparatus and method for measuring phase of extreme ultraviolet (EUV) mask and method of fabricating EUV mask including the method Physics 0 Active
US11635371B2 Apparatus and method for measuring phase of extreme ultraviolet (EUV) mask and method of fabricating EUV mask including the method Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.