Rigo Richter
3Patents
2h-index
10Co-inventors
34Inventor score
Filing activity: Jul 11, 2008 → Aug 24, 2010
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8913120B2 | Method for emulation of a photolithographic process and mask inspection microscope for performing the method | Physics | 9 | Active |
| US8730474B2 | Method and apparatus for measuring of masks for the photo-lithography | Physics | 5 | Active |
| US8264535B2 | Method and apparatus for analyzing a group of photolithographic masks | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.