Robert Franken
3Patents
2h-index
8Co-inventors
37Inventor score
Filing activity: Sep 5, 1995 → Feb 6, 2009
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5741422A | Molten metal filter cartridge | Emerging Cross-Sectional Technologies | 113 | Expired |
| US7869022B2 | Inspection method and apparatus lithographic apparatus, lithographic processing cell, device manufacturing method and distance measuring system | Physics | 4 | Active |
| US8208118B2 | Method for determining exposure settings, lithographic exposure apparatus, computer program and data carrier | Physics | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.