Rogier Herman Mathijs Groeneveld
2Patents
2h-index
10Co-inventors
37Inventor score
Filing activity: Jan 12, 2001 → Sep 27, 2006
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6730920B2 | Abbe arm calibration system for use in lithographic apparatus | Physics | 5 | Expired |
| US8908144B2 | Lithographic apparatus and device manufacturing method | Physics | 2 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.