Inventor · Mountain View, CA, US

Scott C. Wackerman

5Patents
4h-index
6Co-inventors
39Inventor score

Filing activity: Dec 29, 1998 → Jun 3, 2002

Most-cited inventions

PatentTitleAreaCited byStatus
US6254936A Environment exchange control for material on a wafer surface Physics 22 Expired
US6468586B1 Environment exchange control for material on a wafer surface Physics 14 Expired
US6780461B2 Environment exchange control for material on a wafer surface Physics 13 Expired
US6844027B1 Environment exchange control for material on a wafer surface Physics 7 Expired
US6911091B2 Environment exchange control for material on a wafer surface Physics 1 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.