Scott C. Wackerman
5Patents
4h-index
6Co-inventors
39Inventor score
Filing activity: Dec 29, 1998 → Jun 3, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6254936A | Environment exchange control for material on a wafer surface | Physics | 22 | Expired |
| US6468586B1 | Environment exchange control for material on a wafer surface | Physics | 14 | Expired |
| US6780461B2 | Environment exchange control for material on a wafer surface | Physics | 13 | Expired |
| US6844027B1 | Environment exchange control for material on a wafer surface | Physics | 7 | Expired |
| US6911091B2 | Environment exchange control for material on a wafer surface | Physics | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.