Semyon Shertinsky
2Patents
2h-index
8Co-inventors
30Inventor score
Filing activity: Mar 24, 1995 → Feb 17, 1998
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5822171A | Electrostatic chuck with improved erosion resistance | Emerging Cross-Sectional Technologies | 36 | Expired |
| US6023405A | Electrostatic chuck with improved erosion resistance | Emerging Cross-Sectional Technologies | 31 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.