Inventor · Baoshan, TW

Shun-Hsiang Chen

3Patents
2h-index
4Co-inventors
27Inventor score

Filing activity: Dec 16, 1996 → Oct 6, 1997

Most-cited inventions

PatentTitleAreaCited byStatus
US6214184A Insulated wafer pedestal Electricity 25 Expired
US5932929A Tungsten tunnel-free process Electricity 5 Expired
US5698466A Tungsten tunnel-free process Electricity 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.