Inventor · Heidelberg, DE

Siegfried Hunklinger

4Patents
4h-index
8Co-inventors
43Inventor score

Filing activity: Jun 22, 1981 → Sep 24, 1991

Most-cited inventions

PatentTitleAreaCited byStatus
US4732473A Apparatus for, and methods of, determining the characteristics of semi-conductor wafers Physics 50 Expired
US4727381A Appartus for, and methods of, inscribing patterns on semiconductor wafers Electricity 45 Expired
US5221871A Surface wave gas sensor Physics 23 Expired
US4429999A Method for calorimetric absorption spectroscopy and device for working the method Physics 12 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.