Soctt D. Allen
1Patents
1h-index
4Co-inventors
25Inventor score
Filing activity: Sep 16, 2002 → Sep 16, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6903023B2 | In-situ plasma etch for TERA hard mask materials | Electricity | 8 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.