Spencer Rich
2Patents
1h-index
7Co-inventors
30Inventor score
Filing activity: Nov 29, 2016 → Aug 14, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9755396B1 | EUV LPP source with improved dose control by combining pulse modulation and pulse control mode | Electricity | 1 | Active |
| US12085862B2 | Laser system for source material conditioning in an EUV light source | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.