Inventor · Amsterdam, NL

Stephen EDWARD

2Patents
1h-index
9Co-inventors
27Inventor score

Filing activity: Jan 10, 2018 → May 15, 2018

Most-cited inventions

PatentTitleAreaCited byStatus
US10788765B2 Method and apparatus for measuring a structure on a substrate Physics 2 Active
US11042096B2 Alignment measurement system Physics 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.