Terry Leung
3Patents
2h-index
10Co-inventors
37Inventor score
Filing activity: Jun 14, 2002 → Oct 31, 2006
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6897154B2 | Selective etching of low-k dielectrics | Electricity | 5 | Expired |
| US7071112B2 | BARC shaping for improved fabrication of dual damascene integrated circuit features | Electricity | 2 | Expired |
| US7758763B2 | Plasma for resist removal and facet control of underlying features | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.