Tom Letson
3Patents
3h-index
2Co-inventors
36Inventor score
Filing activity: Feb 20, 2002 → Sep 27, 2006
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7615462B2 | Etch stop layer for silicon (Si) via etch in three-dimensional (3-D) wafer-to-wafer vertical stack | Electricity | 151 | Active |
| US6645832B2 | Etch stop layer for silicon (Si) via etch in three-dimensional (3-D) wafer-to-wafer vertical stack | Electricity | 46 | Expired |
| US7148565B2 | Etch stop layer for silicon (Si) via etch in three-dimensional (3-D) wafer-to-wafer vertical stack | Electricity | 39 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.