Tomohiro MOTONO
2Patents
0h-index
9Co-inventors
24Inventor score
Filing activity: Sep 15, 2020 → Nov 22, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11281108B2 | Exposure device | Electricity | 0 | Active |
| US12374541B2 | Substrate processing apparatus and substrate processing method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.