Toshihiro Itho
1Patents
1h-index
2Co-inventors
22Inventor score
Filing activity: Dec 6, 1999 → Dec 6, 1999
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6342166B1 | Method of detecting end point of polishing of wafer and apparatus for detecting end point of polishing | Electricity | 12 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.