Vijay K. Singhal
1Patents
1h-index
2Co-inventors
22Inventor score
Filing activity: Jan 5, 1987 → Jan 5, 1987
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4728799A | Height measurement and correction method for electron beam lithography system | Electricity | 10 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.