Inventor · Boston, MA, US

Vijay K. Singhal

1Patents
1h-index
2Co-inventors
22Inventor score

Filing activity: Jan 5, 1987 → Jan 5, 1987

Most-cited inventions

PatentTitleAreaCited byStatus
US4728799A Height measurement and correction method for electron beam lithography system Electricity 10 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.