Won-Don Joo
9Patents
1h-index
34Co-inventors
43Inventor score
Filing activity: Nov 2, 2012 → Jun 11, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8841824B2 | Broadband light illuminators | Electricity | 4 | Active |
| US9425036B2 | Light source device and semiconductor manufacturing apparatus including the same | Electricity | 1 | Active |
| US10670968B2 | Maskless exposure method, maskless exposure apparatus and method of manufacturing a semiconductor device using the same | Electricity | 1 | Active |
| US10910202B2 | Plasma sensing device, plasma monitoring system and method of controlling plasma processes | Electricity | 0 | Active |
| US9891537B2 | Maskless lithographic apparatus measuring accumulated amount of light | Physics | 0 | Active |
| US10816480B2 | Method of detecting a defect on a substrate, apparatus for performing the same and method of manufacturing semiconductor device using the same | Physics | 0 | Active |
| US9255694B2 | Reflector structure of illumination optic system | Physics | 0 | Active |
| US11047901B2 | Method of testing an interconnection substrate and apparatus for performing the same | Physics | 0 | Active |
| US9839110B2 | Plasma light source apparatus and light source system including the same | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.