Inventor · Incheon, KR

Won-Don Joo

9Patents
1h-index
34Co-inventors
43Inventor score

Filing activity: Nov 2, 2012 → Jun 11, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US8841824B2 Broadband light illuminators Electricity 4 Active
US9425036B2 Light source device and semiconductor manufacturing apparatus including the same Electricity 1 Active
US10670968B2 Maskless exposure method, maskless exposure apparatus and method of manufacturing a semiconductor device using the same Electricity 1 Active
US10910202B2 Plasma sensing device, plasma monitoring system and method of controlling plasma processes Electricity 0 Active
US9891537B2 Maskless lithographic apparatus measuring accumulated amount of light Physics 0 Active
US10816480B2 Method of detecting a defect on a substrate, apparatus for performing the same and method of manufacturing semiconductor device using the same Physics 0 Active
US9255694B2 Reflector structure of illumination optic system Physics 0 Active
US11047901B2 Method of testing an interconnection substrate and apparatus for performing the same Physics 0 Active
US9839110B2 Plasma light source apparatus and light source system including the same Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.