Xiaoda Sun
1Patents
0h-index
12Co-inventors
23Inventor score
Filing activity: Mar 17, 2022 → Mar 17, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US12112938B2 | Semiconductor processing preclean methods and apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.