Xingcun Li
3Patents
1h-index
8Co-inventors
30Inventor score
Filing activity: Dec 3, 2014 → Nov 8, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10699881B2 | Impedance matching system, impedance matching method, and semiconductor processing apparatus thereof | Electricity | 5 | Active |
| US10854482B2 | Reaction chamber and plasma processing apparatus | Electricity | 1 | Active |
| US11715632B2 | Reaction chamber and semiconductor processing apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.