Inventor · Sunnyvale, CA, US

Young Jai Lee

5Patents
5h-index
6Co-inventors
48Inventor score

Filing activity: Jul 28, 2003 → May 10, 2010

Most-cited inventions

PatentTitleAreaCited byStatus
US7115837B2 Selective reflectivity process chamber with customized wavelength response and method Mechanical Engineering; Lighting; Heating 18 Expired
US8405005B2 Electrostatic chuck system and process for radially tuning the temperature profile across the surface of a substrate Electricity 13 Active
US7045746B2 Shadow-free shutter arrangement and method Mechanical Engineering; Lighting; Heating 10 Expired
US7737385B2 Selective reflectivity process chamber with customized wavelength response and method Mechanical Engineering; Lighting; Heating 7 Active
US9633876B2 Selective reflectivity process chamber with customized wavelength response and method Mechanical Engineering; Lighting; Heating 5 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.