Patent · US Active

MEMS component

US10000374B2 · kind B2 · utility

1Cited by

1References

7Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Christoph Schelling · Stuttgart, DE
Benedikt Stein · Stuttgart, DE
Michael Stumber · Ditzingen, DE

Key dates

Filing date	Jun 23, 2015
Grant date	Jun 19, 2018
Priority date	—
Expiry date	Jun 23, 2035

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2203/0136
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A layer material which is particularly suitable for the realization of self-supporting structural elements having an electrode in the layer structure of a MEMS component. The self-supporting structural element is at least partially made up of a silicon carbonitride (Si1-x-yCxNy)-based layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.