Method for producing a micro-electromechanical component and a micro-electromechanical component
US10000376B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 11, 2015 |
| Grant date | Jun 19, 2018 |
| Priority date | — |
| Expiry date | Feb 11, 2035 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C1/00301
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A component is produced by creating a first layer composite that includes a first electrically conductive substrate and having a trench filled with an insulating material by creating a second layer composite that includes the first layer composite and a structure layer. The structure layer includes an active structure and is electrically conductive at least in a first region that adjoins a first surface of the first substrate and includes in the first region of the first substrate a first electrically conductive contact face on a second surface of the first substrate, which is located opposite the first surface. The first region of the first substrate is electrically insulated laterally from other regions of the first substrate by the trench.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.