Micromirror device and projection device
US10001643B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 29, 2015 |
| Grant date | Jun 19, 2018 |
| Priority date | — |
| Expiry date | May 29, 2035 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/058
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micromirror device including a drive unit, which includes a movable drive element, which is situated in a first plane, and a guiding device, and a mirror, which is elastically coupled to the drive element and is situated in the idle position in a second plane, which is in parallel to the first plane, the guiding device being designed to guide a movement of the drive element on a straight line situated in the first plane. Furthermore, a corresponding projection device is described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.