Manufacturing supporting system, manufacturing supporting method, and manufacturing supporting program for electronic device
US10001774B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 25, 2014 |
| Grant date | Jun 19, 2018 |
| Priority date | — |
| Expiry date | Feb 1, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
There is provided a manufacturing supporting system for an electronic device including an inspection-data acquiring unit, a fluctuation-by-classification calculating unit, a data-by-factor acquiring unit, and a fluctuation-by-factor calculating unit is provided. The inspection-data acquiring unit acquires an inspection data of a target electronic device. The fluctuation-by-classification calculating unit is configured to calculate, on the basis of the inspection data, by classification including at least any one of positions among lots, among substrates, and in a substrate plane of the electronic device, fluctuation in dimensions of the target electronic device. The data-by-factor acquiring unit acquires an improvement history data of the target electronic device. The fluctuation-by-factor calculating unit is configured to determine a plurality of fluctuation factors of the target electronic device on the basis of information concerning the plurality of fluctuation factors included in the improvement history data of the target electronic device, and calculate fluctuation in dimensions by the determined plurality of fluctuation factors. Thereby, there is provided a manufacturing sup…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.