Patent · US Active

Extinguishing arcs in a plasma chamber

US10002749B2 · kind B2 · utility

5Cited by

47References

18Claims

0Family size

Assignee

TRUMPF HUETTINGER GMBH + CO. KG · DE

Inventors

Andre Grede · Glückstadt, DE
Daniel Krausse · Mountain View, US
Anton Labanc · Ehrenkirchen, DE
Christan Thome · Glückstadt, DE
Alberto Vidal · San Jose, US

Key dates

Filing date	Jun 18, 2015
Grant date	Jun 19, 2018
Priority date	—
Expiry date	Nov 19, 2035

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/3299
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An arc extinguishing method for extinguishing arcs in a plasma chamber of a plasma system, comprising providing a plasma operating power during a plasma operation to the plasma chamber for generating plasma in the plasma chamber and carrying out a plasma-processing process using the generated plasma, by generating an analog signal by a digital-to-analog converter (DAC) and amplifying the generated analog signal on an amplifier path, monitoring, by an arc detection device, the plasma system for arcs, and in response to detecting an occurrence of an arc, controlling the DAC by the arc detection device such that the generated analog signal by the DAC is modified.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.