Patent · US Active

Housing for an infrared radiation micro device and method for fabricating such housing

US10002896B2 · kind B2 · utility

1Cited by

5References

10Claims

0Family size

Assignees

Inventors

Wolfgang Reinert · Neumünster, DE
Jochen Quenzer · Itzehoe, DE
Sebastien Tinnes · Tullins, FR
Cécile Roman · Le Pont-de-Claix, FR

Key dates

Filing date	Jun 21, 2010
Grant date	Jun 19, 2018
Priority date	—
Expiry date	Jul 23, 2031

Classification

Technology area (CPC H)Electricity
CPC primaryH10F39/184
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Infrared radiation micro device, cover for such a device and method for its fabrication, the device comprising a substrate and a cover and an infrared radiation detecting, emitting or reflecting infrared micro unit, the infrared micro unit being arranged in a cavity defined between the substrate and the cover, the cover comprising an antireflective surface texture to enhance the transmissibility of infrared radiation, wherein a distance frame formed in an additive process on the substrate side of the cover and/or the cover side of the substrate is arranged between substrate and cover.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.