Vertical wafer boat
US10008402B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 14, 2018 |
| Grant date | Jun 26, 2018 |
| Priority date | — |
| Expiry date | Feb 14, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6875
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A vertical wafer boat includes a top plate, a bottom plate, three support posts, and wafer support parts. The support posts include a first and a second support posts arranged in right and left sides of a starting end side of a wafer inserting direction, and a third support post arranged in a center of a terminal end side of the wafer inserting direction. The wafer support parts include a first, second and third wafer support parts protruding in the horizontal direction from side surfaces of the first, second and third support posts, respectively. A total of horizontal sectional areas of the first wafer support part and the first support post, or the second wafer support part and the second support post, and a total of horizontal sectional areas of the third wafer support part and the third support post have a specific relationship.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.