Imprint apparatus and article manufacturing method
US10011056B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 10, 2015 |
| Grant date | Jul 3, 2018 |
| Priority date | — |
| Expiry date | May 11, 2036 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB29C2043/5833
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
The present invention provides an imprint apparatus including an amplifier configured to amplify a signal of displacement between a mold and a substrate, and a control unit configured to perform alignment between the mold and the substrate based on the amplified signal, wherein the control unit performs the alignment through a first operation of moving the substrate with respect to the mold in a first direction and a second operation of moving the substrate with respect to the mold in a second direction that is opposite to the first direction, and in the first operation, the control unit sets the gain of the amplifier to a first gain and changes the gain of the amplifier from the first gain to a second gain.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.