Compensation and calibration of multiple mass MEMS sensor
US10012673B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 15, 2017 |
| Grant date | Jul 3, 2018 |
| Priority date | — |
| Expiry date | Sep 15, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P21/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system includes a MEMS sensor having dual proof masses capable of moving independently from one another in response to forces imposed upon the proof masses. Each proof mass includes an independent set of sense contacts configured to provide output signals corresponding to the physical displacement of the corresponding sense mass. A switch system is in communication with the sense contacts. The switch system is configured to enable a sense mode and various test modes for the MEMS sensor. When the switch system enables a sense mode, output signals from the sense contacts can be combined to produce sense signals. When the switch system enables a test mode, the second contacts are electrically decoupled from one another to disassociate the output signals from one another. The independent sense contacts and switch system enable the concurrent compensation and calibration of the proof masses along two different sense axes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.