Optical monitoring of scan parameters
US10012831B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 3, 2015 |
| Grant date | Jul 3, 2018 |
| Priority date | — |
| Expiry date | Mar 26, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/0031
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Scanning apparatus includes a transmitter, which is configured to emit a beam comprising pulses of light, and a scanner, which is configured to scan the beam along a scan axis over a specified angular range. A scattering line extends across a path of the scanned beam. A receiver is configured to receive the light scattered from the scattering line and to generate an output indicative of an intensity of the scattered light. A controller is coupled to process the output of the receiver so as to monitor operation of the scanner.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.