Developing method and developing device
US10012906B2 · kind B2 · utility
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18Claims
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Key dates
| Filing date | Jul 12, 2017 |
| Grant date | Jul 3, 2018 |
| Priority date | — |
| Expiry date | Jul 12, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D86/021
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A developing device includes a spraying assembly and a concentration regulating assembly. A developing method usable in the developing device includes: spraying developing agents by a spraying assembly onto respective developing regions on a substrate to be developed; and spraying a regulating liquid by a concentration regulating assembly onto a target developing region on the substrate to be developed to change concentration of the developing agents.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.