Application of coating materials
US10014163B2 · kind B2 · utility
4Cited by
16References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 7, 2012 |
| Grant date | Jul 3, 2018 |
| Priority date | — |
| Expiry date | Mar 26, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6719
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The invention relates to apparatus and a method for applying coatings to substrates such as, for example, a lens or electronic component. The apparatus includes a coating chamber in which there is provided one or more magnetrons which include, typically, an at least partially oxidized metal or metal alloy. A carrier is provided for the substrates to be moved and held in the coating chamber and the carrier is formed from a plurality of units on which the substrates are positioned and the units can be brought together to form the carrier.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.