Piezoelectric nanoelectromechanical relays
US10014462B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 21, 2016 |
| Grant date | Jul 3, 2018 |
| Priority date | — |
| Expiry date | Oct 20, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2057/006
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus comprises: a body terminal comprising a first body electrode and a second body electrode; a gate terminal comprising a first gate electrode and a second gate electrode; a first actuator between the first body electrode and the first gate electrode, the first actuator comprising a first piezoelectric material; a second actuator between the second body electrode and the second gate electrode, the second actuator comprising a second piezoelectric material; a beam comprising a first end attached to the first actuator, a second end attached to the second actuator, and a suspended section between the first end and the second end; a metal channel attached to the suspended section of the beam; a source terminal extending over the beam; and a drain terminal extending over the beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.