Micro pumps
US10018194B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 10, 2013 |
| Grant date | Jul 10, 2018 |
| Priority date | — |
| Expiry date | Oct 16, 2034 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04B53/10
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A micro pump is formed on a substrate having a common inlet channel and a common outlet channel by a plurality of pumping elements, each pumping element having an inlet coupled to the common inlet channel and an outlet coupled to the common outlet channel, the inlet and outlet connected by a microfluidic channel, the microfluidic channel comprising a valvular conduit having low fluid flow resistance in a direction from the inlet to the outlet and high fluid flow resistance in a direction from the outlet to the inlet, and an actuating element arranged to cause fluid to be pumped through the microfluidic channel from the inlet to the outlet, wherein the actuating element is based on one or more of piezoelectric, thermal, electrostatic or electromagnetic transduction. A controller is coupled to actuate the actuating elements at mutually staggered relative timing so as to produce a substantially continuous steady flow.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.