Interferometric measuring device with detectors set at different angular ranges

US10018460B2 · kind B2 · utility

Assignee

• Polytec GmbH · CA

Inventors

• Matthias Schussler · Waldbronn, DE
• Christian Rembe · Waldbronn, DE
• Alexander Drabenstedt · Ettlingen, DE
• Robert Kowarsch · Waldbronn, DE
• Wanja Ochs · Karlsruhe, DE

Key dates

• Filing date: Nov 2, 2012
• Grant date: Jul 10, 2018
• Expiry date: Mar 20, 2033

Classification

• Technology area (CPC G): Physics
• CPC primary: G01H9/00
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A device for the interferometric measuring of an object, including a light source to generate an emitted beam, a beam splitting device for splitting the emitted beam into a measuring beam and at least first and second reference beams, an optic interference device, and first and second detectors, with the interference device and the first detector being embodied cooperating such that the measuring beam, at least partially reflected by the object, and the first reference beam are interfered on at least one detector area of the first detector. The interference device and the second detector are embodied cooperating such that the measuring beam, at least partially scattered by the object, and the second reference beam are interfered on at least one detector area of the second detector. A method is also provided for the interferometric measuring of an object.