Patent · US Active

Laser microscope apparatus including photodetector having a plurality of detection elements and an adjusting mechanism for adjusting the beam diameter

US10018822B2 · kind B2 · utility

0Cited by
5References
20Claims
0Family size

Assignee

Inventor

Key dates

Filing dateMay 27, 2015
Grant dateJul 10, 2018
Priority date
Expiry dateJul 20, 2035

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N21/6458
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

By using a PPD as a detector, photon count loss is reduced to the utmost, and the incident light-intensity range in which light can be detected is widened. Provided is a laser microscope apparatus including an objective lens that collects return light from a specimen; a collimator lens that converts the return light collected by the objective lens into a substantially collimated beam, a PPD including a plurality of pixels that detect the return light converted to a substantially collimated beam by the collimator lens; and a controller that makes the beam diameter of the return light incident on the PPD substantially equal to an effective detection area of the PPD, formed by the plurality of pixels.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.