Surface acoustic wave (SAW) resonator
US10020796B2 · kind B2 · utility
3Cited by
27References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 25, 2015 |
| Grant date | Jul 10, 2018 |
| Priority date | — |
| Expiry date | Aug 25, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/6483
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A surface acoustic wave (SAW) resonator includes a piezoelectric layer disposed over a substrate, and a plurality of electrodes disposed over the first surface of the piezoelectric layer. A layer is disposed between the substrate and the piezoelectric layer. A surface of the layer has a smoothness sufficient to foster atomic bonding between layer and the piezoelectric layer. A plurality of features provided on a surface of the substrate reflects acoustic waves and reduce the incidence of spurious modes in the piezoelectric layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.