Method and systems to control optical transmissivity of a polish pad material
US10022842B2 · kind B2 · utility
3Cited by
18References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 19, 2015 |
| Grant date | Jul 17, 2018 |
| Priority date | — |
| Expiry date | Jul 11, 2035 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB29C41/042
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A method and systems for controlling optical transmissivity of a polish pad material are provided. The method and systems may include adjusting control parameters to determine the optical transmissivity of a polish pad material. The control parameters may also include pre-processing controls, casting controls, and/or curing controls. Methods and systems also provided for assembling a polish pad that controls the optical transmissivity of the polish pad. Additionally, a polish pad with a controlled optical transmissivity is provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.