Substrate transporter
US10022865B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 27, 2015 |
| Grant date | Jul 17, 2018 |
| Priority date | — |
| Expiry date | Feb 27, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S901/17
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
Aspects of the present disclosure describe a robot which has a controller, actuators, encoders, and mechanical components. The robot may produce motion about an X, Z, RU, RL, and Theta axes. Movements of the robot are controlled by the controller. The repeatability of the robot is improved by designing the robot such that a control cycle frequency of the controller is 50 times or more greater than a vibrational frequency of one or more of the mechanical components. In order to reduce the release of particulates, a baffled enclosure may be used. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. This abstract is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.