Patent · US Active

System and methods for highly integrated optical readout MEMS sensors

US10024656B2 · kind B2 · utility

2Cited by
28References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 26, 2015
Grant dateJul 17, 2018
Priority date—
Expiry dateMay 26, 2035

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B2006/12138
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

System and methods for highly integrated optical readout MEMS sensors are provided. In one embodiment, a method for an integrated waveguide optical-pickoff sensor comprises: launching a laser beam generated by a laser light source into an integrated waveguide optical-pickoff monolithically fabricated within a first substrate, the integrated waveguide optical-pickoff including an optical input port, a coupling port, and an optical output port; and detecting an amount of coupling of the laser beam from the coupling port to a sensor component separated from the coupling port by a gap by measuring an attenuation of the laser beam at the optical output port.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.