Micromechanical coriolis rate of rotation sensor
US10024663B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 19, 2016 |
| Grant date | Jul 17, 2018 |
| Priority date | — |
| Expiry date | May 21, 2036 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/1293
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micromechanical sensor that can detect shock effects in order to prevent false measurements. The sensor includes a substrate having a measurement axis and a detection axis that are disposed orthogonally to each other, and first and second driving masses disposed in a plane containing the measurement and detection axes. Each of the driving masses is rotatably coupled to the substrate via a central suspension disposed on the detection axis. The sensor includes drive electrodes that generate rotary motions in each of the driving masses about a drive axis thereof. At least one elastic connecting element allows the driving masses to deflect in opposite directions in response to a rate of rotation about the measurement axis but deflect in the same direction in response to a shock condition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.