Grating structure, and manufacturing method of grating coupler provided therewith
US10025031B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 7, 2016 |
| Grant date | Jul 17, 2018 |
| Priority date | — |
| Expiry date | Mar 7, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12147
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A grating structure for a grating coupler is provided which has a high efficiency resulting from the operating principle, is easily manufactured, and simultaneously has little reflection loss. This grating structure is provided with a core layer having periodic recesses and protrusions formed on the upper surface, a first upper cladding layer in contact with the upper surface of the core layer, a second upper cladding layer in contact with the upper surface of the first upper cladding layer, and a first lower cladding layer in contact with the lower surface of the core layer. The recessed portions of said recesses and protrusions are filled with the same material as the first upper cladding layer. The refractive index of the material forming the core layer is greater than the refractive index of the materials forming the first upper cladding layer, the second upper cladding layer and the first lower cladding layer. The refractive index of the material of the first upper cladding layer is greater than the refractive index of the material of the second upper cladding layer. The thickness from the upper surface of the protruding portions of the recesses and protrusions to the upper su…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.