Internally generated DFT stepped hysteresis sweep for electrostatic MEMS
US10029914B2 · kind B2 · utility
5Cited by
2References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 23, 2015 |
| Grant date | Jul 24, 2018 |
| Priority date | — |
| Expiry date | Jul 21, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D1/64
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present invention generally relates to a mechanism for testing a MEMS hysteresis. A power management circuit may be coupled to the electrodes that cause the movable plate that is disposed between the electrodes in a MEMS device to move. The power management circuit may utilize a charge pump, a comparator and a resistor ladder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.