Patent · US Active

Apparatus and process for producing thin layers

US10030307B2 · kind B2 · utility

0Cited by

26References

12Claims

0Family size

Assignee

Gebr. Schmid GmbH · DE

Inventors

Christian Schmid · San Diego, US
Dirk Habermann · Kirchzarten, DE
Jürgen Haungs · Freudenstadt, DE
Chuck Attema · Santa Cruz, US
Tom Stewart · San Francisco, US
Kenneth Provancha · Soquel, US

Key dates

Filing date	Jul 26, 2012
Grant date	Jul 24, 2018
Priority date	—
Expiry date	Aug 28, 2033

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02E10/50
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

In an apparatus for producing thin layers on substrates for solar cell production, wherein the thin layers are applied by an APCVD process at temperatures of more than 250° C., the substrates are conveyed on a horizontal conveyor path and coated by means of an APCVD coating in continuous operation. The conveyor path has conveyor rollers, which consist of a temperature-resistant, non-metallic material, preferably of ceramic. A heating device and/or a purge gas feeding device is/are arranged on that side of the conveyor path which is remote from the coating apparatus.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.